Assignee
TSUJIMOTO HIROSHI
JP·3 granted patents·17 citations·filing 2007–2010
Top patents by PatentIndex Score
3 records- 0182US8277673B2Plasma processing method and apparatusTSUJIMOTO HIROSHI·Filed 2009·Granted Oct 2, 2012·10 cites·10 claims
- 0276US8328981B2Method for heating a focus ring in a plasma apparatus by high frequency power while no plasma being generatedTSUJIMOTO HIROSHI·Filed 2010·Granted Dec 11, 2012·4 cites·8 claims
- 0368US8070972B2Etching method and etching apparatusTSUJIMOTO HIROSHI·Filed 2007·Granted Dec 6, 2011·3 cites·3 claims
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