Assignee
TSUKAMOTO YUJI
US·3 granted patents·21 citations·filing 2006–2010
Top patents by PatentIndex Score
3 records- 0189US8207476B2Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing systemTSUKAMOTO YUJI·Filed 2009·Granted Jun 26, 2012·14 cites·18 claims
- 0277US8057633B2Post-etch treatment system for removing residue on a substrateTSUKAMOTO YUJI·Filed 2006·Granted Nov 15, 2011·7 cites·28 claims
- 0346US8450657B2Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing systemTSUKAMOTO YUJI·Filed 2010·Granted May 28, 2013·0 cites·22 claims
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