Assignee
TSUKINOKI WATARU
JP·3 granted patents·20 citations·filing 2008–2011
Top patents by PatentIndex Score
3 records- 0184US8731701B2Substrate treatment method and substrate treatment systemTSUKINOKI WATARU·Filed 2008·Granted May 20, 2014·12 cites·22 claims
- 0277US8909364B2Substrate processing system and substrate processing methodTSUKINOKI WATARU·Filed 2011·Granted Dec 9, 2014·5 cites·12 claims
- 0367US8219233B2Substrate treatment apparatusTSUKINOKI WATARU·Filed 2010·Granted Jul 10, 2012·3 cites·6 claims
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