Assignee

TSURUDA TOYOHISA

JP·2 granted patents·8 citations·filing 2010–2012

Technology mixH10P2 B32B1 G03F1 Y10T1

Top patents by PatentIndex Score

2 records

0179US8801891B2Substrate warpage removal apparatus and substrate processing apparatusTSURUDA TOYOHISA·Filed 2012·Granted Aug 12, 2014·6 cites·2 claims
0264US8455183B2Resist pattern slimming treatment methodTSURUDA TOYOHISA·Filed 2010·Granted Jun 4, 2013·2 cites·3 claims

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