Assignee

TSURUTA KAORU

JP2 patents

Top patents by PatentIndex Score

US8183544B2May 22, 2012

Correcting substrate for charged particle beam lithography apparatus

TSURUTA KAORU10 citations80

US8748843B2Jun 10, 2014

Charged particle beam drawing apparatus and charged particle beam drawing method

TSURUTA KAORU2 citations55