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UBMATERIALS INC
KR7 patents
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US9469800B2Oct 18, 2016
Abrasive particle, polishing slurry, and method of manufacturing semiconductor device using the same
UBMATERIALS INC12 citations82
US9567490B2Feb 14, 2017
Polishing slurry and substrate polishing method using the same
UBMATERIALS INC2 citations71
US9834705B2Dec 5, 2017
Polishing slurry and method of polishing substrate using the same
UBMATERIALS INC1 citations51
US9758698B2Sep 12, 2017
Polishing slurry and substrate polishing method using the same
UBMATERIALS INC0 citations51
US9493679B2Nov 15, 2016
Methods of manufacturing abrasive particle and polishing slurry
UBMATERIALS INC0 citations51
US9206337B2Dec 8, 2015
Methods of manufacturing abrasive particle and polishing slurry
UBMATERIALS INC1 citations51
US9790401B2Oct 17, 2017
Abrasive particles, polishing slurry and method of fabricating abrasive particles
UBMATERIALS INC0 citations40