Assignee
UEDA SHINTARO
JP·2 granted patents·1,070 citations·filing 2011–2011
Technology mixC23C2
Top patents by PatentIndex Score
2 records- 0195US8592005B2Atomic layer deposition for controlling vertical film growthUEDA SHINTARO·Filed 2011·Granted Nov 26, 2013·542 cites·12 claims
- 0295US8465811B2Method of depositing film by atomic layer deposition with pulse-time-modulated plasmaUEDA SHINTARO·Filed 2011·Granted Jun 18, 2013·528 cites·20 claims
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