Assignee
UENO YOSHIFUMI
JP·6 granted patents·1 pending application·43 citations·filing 2008–2012
Top patents by PatentIndex Score
7 records- 0189US8067756B2Extreme ultraviolet light source apparatusUENO YOSHIFUMI·Filed 2009·Granted Nov 29, 2011·24 cites·12 claims
- 0285US8492738B2Apparatus for and method of withdrawing ions in EUV light production apparatusUENO YOSHIFUMI·Filed 2012·Granted Jul 23, 2013·6 cites·11 claims
- 0368US8129700B2Optical element contamination preventing method and optical element contamination preventing device of extreme ultraviolet light sourceUENO YOSHIFUMI·Filed 2008·Granted Mar 6, 2012·7 cites·13 claims
- 0467US8513630B2Extreme ultraviolet light source apparatusUENO YOSHIFUMI·Filed 2011·Granted Aug 20, 2013·2 cites·6 claims
- 0561US8288743B2Apparatus for and method of withdrawing ions in EUV light production apparatusUENO YOSHIFUMI·Filed 2009·Granted Oct 16, 2012·4 cites·21 claims
- 0638US8901522B2Chamber apparatus and extreme ultraviolet light generation systemUENO YOSHIFUMI·Filed 2011·Granted Dec 2, 2014·0 cites·7 claims
- 0736US2010192973A1Extreme ultraviolet light source apparatus and cleaning methodUENO YOSHIFUMI·Filed 2010·Application pending·0 cites
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