Assignee
ULTRATECH INC
US·91 granted patents·26 pending applications·1,508 citations·filing 2000–2019
Top patents by PatentIndex Score
117 records- 0198US9929011B2Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocationsULTRATECH INC·Filed 2017·Granted Mar 27, 2018·463 cites·10 claims
- 0296US8014427B1Line imaging systems and methods for laser annealingULTRATECH INC·Filed 2010·Granted Sep 6, 2011·33 cites·20 claims
- 0396US7514305B1Apparatus and methods for improving the intensity profile of a beam image used to process a substrateULTRATECH INC·Filed 2006·Granted Apr 7, 2009·37 cites·22 claims
- 0495US7847213B1Method and apparatus for modifying an intensity profile of a coherent photonic beamULTRATECH INC·Filed 2007·Granted Dec 7, 2010·32 cites·24 claims
- 0595US7154066B2Laser scanning apparatus and methods for thermal processingULTRATECH INC·Filed 2004·Granted Dec 26, 2006·81 cites·10 claims
- 0694US8026519B1Systems and methods for forming a time-averaged line imageULTRATECH INC·Filed 2010·Granted Sep 27, 2011·20 cites·11 claims
- 0794US7494942B2Laser thermal annealing of lightly doped silicon substratesULTRATECH INC·Filed 2006·Granted Feb 24, 2009·22 cites·9 claims
- 0894US7482254B2Apparatus and methods for thermally processing undoped and lightly doped substrates without pre-heatingULTRATECH INC·Filed 2005·Granted Jan 27, 2009·25 cites·24 claims
- 0994US7399945B2Method of thermal processing a substrate with direct and redirected reflected radiationULTRATECH INC·Filed 2006·Granted Jul 15, 2008·23 cites·6 claims
- 1094US6879383B2Large-field unit-magnification projection systemULTRATECH INC·Filed 2002·Granted Apr 12, 2005·44 cites·21 claims
- 1193US7098155B2Laser thermal annealing of lightly doped silicon substratesULTRATECH INC·Filed 2004·Granted Aug 29, 2006·57 cites·8 claims
- 1293US6813098B2Variable numerical aperture large-field unit-magnification projection systemULTRATECH INC·Filed 2003·Granted Nov 2, 2004·42 cites·34 claims
- 1392US8691598B1Dual-loop control for laser annealing of semiconductor wafersULTRATECH INC·Filed 2012·Granted Apr 8, 2014·18 cites·9 claims
- 1492US7751067B1Substrate-alignment using detector of substrate materialULTRATECH INC·Filed 2007·Granted Jul 6, 2010·19 cites·31 claims
- 1592US7744274B1Methods and apparatus for temperature measurement and control on a remote substrate surfaceULTRATECH INC·Filed 2007·Granted Jun 29, 2010·30 cites·20 claims
- 1692US7176405B2Heat shield for thermal processingULTRATECH INC·Filed 2005·Granted Feb 13, 2007·17 cites·22 claims
- 1792US6863403B2Deep ultraviolet unit-magnification projection optical system and projection exposure apparatusULTRATECH INC·Filed 2003·Granted Mar 8, 2005·46 cites·10 claims
- 1891US10316406B2Methods of forming an ALD-inhibiting layer using a self-assembled monolayerULTRATECH INC·Filed 2016·Granted Jun 11, 2019·12 cites·22 claims
- 1989US9411163B2High-efficiency line-forming optical systems and methodsULTRATECH INC·Filed 2015·Granted Aug 9, 2016·5 cites·15 claims
- 2088US9666432B2Method and apparatus for forming device quality gallium nitride layers on silicon substratesULTRATECH INC·Filed 2014·Granted May 30, 2017·6 cites·27 claims
- 2188US7177099B2Deep ultraviolet unit-magnification projection optical system and projection exposure apparatusULTRATECH INC·Filed 2005·Granted Feb 13, 2007·16 cites·14 claims
- 2287US10083843B2Laser annealing systems and methods with ultra-short dwell timesULTRATECH INC·Filed 2015·Granted Sep 25, 2018·4 cites·11 claims
- 2387US9567670B2Method for high-velocity and atmospheric-pressure atomic layer deposition with substrate and coating head separation distance in the millimeter rangeULTRATECH INC·Filed 2014·Granted Feb 14, 2017·3 cites·13 claims
- 2487US8865603B2Laser annealing systems and methods with ultra-short dwell timesULTRATECH INC·Filed 2013·Granted Oct 21, 2014·7 cites·20 claims
- 2587US7879741B2Laser thermal annealing of lightly doped silicon substratesULTRATECH INC·Filed 2006·Granted Feb 1, 2011·10 cites·18 claims
- 2687US7433051B2Determination of lithography misalignment based on curvature and stress mapping data of substratesULTRATECH INC·Filed 2007·Granted Oct 7, 2008·16 cites·31 claims
- 2787US7253376B2Methods and apparatus for truncating an image formed with coherent radiationULTRATECH INC·Filed 2005·Granted Aug 7, 2007·15 cites·43 claims
- 2887US6825101B1Methods for annealing a substrate and article produced by such methodsULTRATECH INC·Filed 2000·Granted Nov 30, 2004·36 cites·65 claims
- 2986US10090153B2Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocationsULTRATECH INC·Filed 2017·Granted Oct 2, 2018·3 cites·8 claims
- 3086US7763828B2Laser thermal processing with laser diode radiationULTRATECH INC·Filed 2003·Granted Jul 27, 2010·35 cites·22 claims
- 3186US7157660B2Laser scanning apparatus and methods for thermal processingULTRATECH INC·Filed 2004·Granted Jan 2, 2007·30 cites·33 claims
- 3286US7148159B2Laser thermal annealing of lightly doped silicon substratesULTRATECH INC·Filed 2003·Granted Dec 12, 2006·31 cites·17 claims
- 3385US8986562B2Methods of laser processing photoresist in a gaseous environmentULTRATECH INC·Filed 2013·Granted Mar 24, 2015·6 cites·33 claims
- 3485US7238915B2Methods and apparatus for irradiating a substrate to avoid substrate edge damageULTRATECH INC·Filed 2005·Granted Jul 3, 2007·8 cites·14 claims
- 3584US8735251B2Through silicon via and method of fabricating sameULTRATECH INC·Filed 2013·Granted May 27, 2014·5 cites·11 claims
- 3684US7947968B1Processing substrates using direct and recycled radiationULTRATECH INC·Filed 2009·Granted May 24, 2011·9 cites·21 claims
- 3783US9613815B2High-efficiency line-forming optical systems and methods for defect annealing and dopant activationULTRATECH INC·Filed 2015·Granted Apr 4, 2017·3 cites·13 claims
- 3881US9935022B2Systems and methods of characterizing process-induced wafer shape for process control using CGS interferometryULTRATECH INC·Filed 2016·Granted Apr 3, 2018·3 cites·23 claims
- 3980US7292616B2CO2 laser stabilization systems and methodsULTRATECH INC·Filed 2005·Granted Nov 6, 2007·6 cites·4 claims
- 4080US7145104B2Silicon layer for uniformizing temperature during photo-annealingULTRATECH INC·Filed 2004·Granted Dec 5, 2006·24 cites·26 claims
- 4180US6809888B1Apparatus and methods for thermal reduction of optical distortionULTRATECH INC·Filed 2003·Granted Oct 26, 2004·20 cites·12 claims
- 4279US10353208B2High-efficiency line-forming optical systems and methods using a serrated spatial filterULTRATECH INC·Filed 2016·Granted Jul 16, 2019·2 cites·20 claims
- 4379US8872408B2Betavoltaic power sources for mobile device applicationsULTRATECH INC·Filed 2013·Granted Oct 28, 2014·4 cites·15 claims
- 4479US8017424B2Dual-sided substrate measurement apparatus and methodsULTRATECH INC·Filed 2010·Granted Sep 13, 2011·3 cites·10 claims
- 4579US6844250B1Method and system for laser thermal processing of semiconductor devicesULTRATECH INC·Filed 2003·Granted Jan 18, 2005·25 cites·31 claims
- 4678US9783888B2Atomic layer deposition headULTRATECH INC·Filed 2015·Granted Oct 10, 2017·1 cites·15 claims
- 4778US8988674B2Systems and methods for measuring high-intensity light beamsULTRATECH INC·Filed 2013·Granted Mar 24, 2015·4 cites·22 claims
- 4878US8580673B2Underfill flow guide structures and method of using sameULTRATECH INC·Filed 2013·Granted Nov 12, 2013·3 cites·5 claims
- 4977US9343307B2Laser spike annealing using fiber lasersULTRATECH INC·Filed 2014·Granted May 17, 2016·3 cites·14 claims
- 5076US9583337B2Oxygen radical enhanced atomic-layer deposition using ozone plasmaULTRATECH INC·Filed 2015·Granted Feb 28, 2017·2 cites·15 claims
Showing the top 50 of 117 patent records by PatentIndex Score.
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