Assignee
ULTRATECH STEPPER INC
US59 patents
Top patents by PatentIndex Score
US6747245B2Jun 8, 2004
Laser scanning apparatus and methods for thermal processing
ULTRATECH STEPPER INC190 citations99
US6635588B1Oct 21, 2003
Method for laser thermal processing using thermally induced reflectivity switch
ULTRATECH STEPPER INC287 citations99
US6531681B1Mar 11, 2003
Apparatus having line source of radiant energy for exposing a substrate
ULTRATECH STEPPER INC241 citations99
US6479821B1Nov 12, 2002
Thermally induced phase switch for laser thermal processing
ULTRATECH STEPPER INC289 citations99
US6072251AJun 6, 2000
Magnetically positioned X-Y stage having six degrees of freedom
ULTRATECH STEPPER INC270 citations99
US6441514B1Aug 27, 2002
Magnetically positioned X-Y stage having six degrees of freedom
ULTRATECH STEPPER INC99 citations98
US6380044B1Apr 30, 2002
High-speed semiconductor transistor and selective absorption process forming same
ULTRATECH STEPPER INC95 citations98
US6365476B1Apr 2, 2002
Laser thermal process for fabricating field-effect transistors
ULTRATECH STEPPER INC125 citations98
US5363196ANov 8, 1994
Apparatus for measuring a departure from flatness or straightness of a nominally-plane mirror for a precision X-Y movable-stage
ULTRATECH STEPPER INC112 citations98
US6324330B1Nov 27, 2001
Folded light tunnel apparatus and method
ULTRATECH STEPPER INC139 citations97
US5908307AJun 1, 1999
Fabrication method for reduced-dimension FET devices
ULTRATECH STEPPER INC138 citations97
US5888888AMar 30, 1999
Method for forming a silicide region on a silicon body
ULTRATECH STEPPER INC122 citations97
US6645838B1Nov 11, 2003
Selective absorption process for forming an activated doped region in a semiconductor
ULTRATECH STEPPER INC60 citations96
US6495390B2Dec 17, 2002
Thermally induced reflectivity switch for laser thermal processing
ULTRATECH STEPPER INC38 citations96
US6383956B2May 7, 2002
Method of forming thermally induced reflectivity switch for laser thermal processing
ULTRATECH STEPPER INC61 citations96
US6366308B1Apr 2, 2002
Laser thermal processing apparatus and method
ULTRATECH STEPPER INC119 citations96
US6303476B1Oct 16, 2001
Thermally induced reflectivity switch for laser thermal processing
ULTRATECH STEPPER INC62 citations96
US6300208B1Oct 9, 2001
Methods for annealing an integrated device using a radiant energy absorber layer
ULTRATECH STEPPER INC61 citations96
US6274488B1Aug 14, 2001
Method of forming a silicide region in a Si substrate and a device having same
ULTRATECH STEPPER INC79 citations96
US6142641ANov 7, 2000
Four-mirror extreme ultraviolet (EUV) lithography projection system
ULTRATECH STEPPER INC131 citations96
US5956603ASep 21, 1999
Gas immersion laser annealing method suitable for use in the fabrication of reduced-dimension integrated circuits
ULTRATECH STEPPER INC83 citations96
US5886432AMar 23, 1999
Magnetically-positioned X-Y stage having six-degrees of freedom
ULTRATECH STEPPER INC80 citations96
US5852693ADec 22, 1998
Low-loss light redirection apparatus
ULTRATECH STEPPER INC63 citations96
US5822066AOct 13, 1998
Point diffraction interferometer and pin mirror for use therewith
ULTRATECH STEPPER INC68 citations96
US5410434AApr 25, 1995
Reflective projection system comprising four spherical mirrors
ULTRATECH STEPPER INC93 citations96
US6753947B2Jun 22, 2004
Lithography system and method for device manufacture
ULTRATECH STEPPER INC53 citations95
US5621813AApr 15, 1997
Pattern recognition alignment system
ULTRATECH STEPPER INC68 citations95
US6507405B1Jan 14, 2003
Fiber-optic interferometer employing low-coherence-length light for precisely measuring absolute distance and tilt
ULTRATECH STEPPER INC95 citations94
US6777833B1Aug 17, 2004
Magnetic levitation stage apparatus and method
ULTRATECH STEPPER INC43 citations93
US6731376B1May 4, 2004
System and method for reducing colinearity effects in manufacturing microdevices
ULTRATECH STEPPER INC17 citations93
US6680774B1Jan 20, 2004
Method and apparatus for mechanically masking a workpiece
ULTRATECH STEPPER INC90 citations93
US6420264B1Jul 16, 2002
Method of forming a silicide region in a Si substrate and a device having same
ULTRATECH STEPPER INC41 citations93
US6388297B1May 14, 2002
Structure and method for an optical block in shallow trench isolation for improved laser anneal control
ULTRATECH STEPPER INC20 citations93
US6381077B1Apr 30, 2002
Scanning microlithographic apparatus and method for projecting a large field-of-view image on a substrate
ULTRATECH STEPPER INC44 citations93
US6326219B2Dec 4, 2001
Methods for determining wavelength and pulse length of radiant energy used for annealing
ULTRATECH STEPPER INC29 citations93
US6089525AJul 18, 2000
Six axis active vibration isolation and payload reaction force compensation system
ULTRATECH STEPPER INC28 citations93
US5557469ASep 17, 1996
Beamsplitter in single fold optical system and optical variable magnification method and system
ULTRATECH STEPPER INC36 citations93
US5303001AApr 12, 1994
Illumination system for half-field dyson stepper
ULTRATECH STEPPER INC31 citations93
US6671235B1Dec 30, 2003
Method of and apparatus for defining disk tracks in magnetic recording media
ULTRATECH STEPPER INC37 citations92
US6556279B1Apr 29, 2003
Motion compensation system and method for lithography
ULTRATECH STEPPER INC34 citations92
US6525805B2Feb 25, 2003
Backside alignment system and method
ULTRATECH STEPPER INC66 citations92
US6387803B2May 14, 2002
Method for forming a silicide region on a silicon body
ULTRATECH STEPPER INC37 citations92
US6347176B1Feb 12, 2002
Acousto-optical light tunnel apparatus and method
ULTRATECH STEPPER INC32 citations92
US6297135B1Oct 2, 2001
Method for forming silicide regions on an integrated device
ULTRATECH STEPPER INC42 citations92
US6029361AFeb 29, 2000
Air-guage nozzle probe structure for microlithographic image focusing
ULTRATECH STEPPER INC40 citations92
US5997963ADec 7, 1999
Microchamber
ULTRATECH STEPPER INC215 citations92
US6635541B1Oct 21, 2003
Method for annealing using partial absorber layer exposed to radiant energy and article made with partial absorber layer
ULTRATECH STEPPER INC29 citations91
US6570656B1May 27, 2003
Illumination fluence regulation system and method for use in thermal processing employed in the fabrication of reduced-dimension integrated circuits
ULTRATECH STEPPER INC48 citations91
US6554464B1Apr 29, 2003
Apparatus for and method of reducing or eliminating interference effects in a light tunnel illuminator
ULTRATECH STEPPER INC31 citations91
US5956564ASep 21, 1999
Method of making a side alignment mark
ULTRATECH STEPPER INC20 citations89
Showing the top 50 of 59 patents by PatentIndex Score.