Assignee
ULVAC CORP
JP66 patents
Top patents by PatentIndex Score
US4624867ANov 25, 1986
Process for forming a synthetic resin film on a substrate and apparatus therefor
ULVAC CORP75 citations96
US6275649B1Aug 14, 2001
Evaporation apparatus
ULVAC CORP73 citations95
US5180476AJan 19, 1993
Method for producing transparent conductive films
ULVAC CORP53 citations95
US4401546AAug 30, 1983
Ferromagnetic high speed sputtering apparatus
ULVAC CORP82 citations95
US5244501ASep 14, 1993
Apparatus for chemical vapor deposition
ULVAC CORP65 citations94
US4924807AMay 15, 1990
Apparatus for chemical vapor deposition
ULVAC CORP62 citations94
US4902531AFeb 20, 1990
Vacuum processing method and apparatus
ULVAC CORP45 citations94
US4283482AAug 11, 1981
Dry Lithographic Process
ULVAC CORP77 citations94
US6101316AAug 8, 2000
Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film
ULVAC CORP62 citations92
US5851589ADec 22, 1998
Method for thermal chemical vapor deposition
ULVAC CORP41 citations92
US5288329AFeb 22, 1994
Chemical vapor deposition apparatus of in-line type
ULVAC CORP52 citations92
US5250339AOct 5, 1993
Magnetic recording medium
ULVAC CORP30 citations92
US4848814AJul 18, 1989
Wafer transfer hand
ULVAC CORP31 citations92
US4837603AJun 6, 1989
Method of correcting azimuth angle of photometric ellipsometers
ULVAC CORP39 citations92
US4832810AMay 23, 1989
Co-based alloy sputter target and process of manufacturing the same
ULVAC CORP31 citations92
US4804590AFeb 14, 1989
Abrasion resistant magnetic recording member
ULVAC CORP34 citations92
US4800105AJan 24, 1989
Method of forming a thin film by chemical vapor deposition
ULVAC CORP47 citations92
US4412907ANov 1, 1983
Ferromagnetic high speed sputtering apparatus
ULVAC CORP29 citations92
US6473564B1Oct 29, 2002
Method of manufacturing thin organic film
ULVAC CORP23 citations91
US5554418ASep 10, 1996
Method of forming passivation film
ULVAC CORP41 citations91
US5228052AJul 13, 1993
Plasma ashing apparatus
ULVAC CORP46 citations91
US5125360AJun 30, 1992
Vacuum processing apparatus
ULVAC CORP27 citations91
US6217730B1Apr 17, 2001
Sputtering device
ULVAC CORP27 citations90
US5011793AApr 30, 1991
Vacuum deposition using pressurized reflow process
ULVAC CORP35 citations90
US4624767ANov 25, 1986
Sputter etching apparatus having a second electrically floating electrode and magnet means
ULVAC CORP39 citations90
US6781812B2Aug 24, 2004
Chuck equipment
ULVAC CORP44 citations89
US6290826B1Sep 18, 2001
Composite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assembly
ULVAC CORP30 citations89
US6254747B1Jul 3, 2001
Magnetron sputtering source enclosed by a mirror-finished metallic cover
ULVAC CORP27 citations89
US5226056AJul 6, 1993
Plasma ashing method and apparatus therefor
ULVAC CORP94 citations89
US4661420AApr 28, 1987
Optical magnetic recording member
ULVAC CORP31 citations89
US6533630B1Mar 18, 2003
Vacuum device and method of manufacturing plasma display device
ULVAC CORP24 citations88
US4894546AJan 16, 1990
Hollow cathode ion sources
ULVAC CORP24 citations87
US4841197AJun 20, 1989
Double-chamber ion source
ULVAC CORP29 citations87
US5770025AJun 23, 1998
Magnetron sputtering apparatus
ULVAC CORP48 citations86
US4816046AMar 28, 1989
Fine particle collector trap for vacuum evacuating system
ULVAC CORP28 citations86
US5751002AMay 12, 1998
Ion implantation apparatus
ULVAC CORP35 citations85
US6812634B2Nov 2, 2004
Graphite nanofibers, electron-emitting source and method for preparing the same, display element equipped with the electron-emitting source as well as lithium ion secondary battery
ULVAC CORP14 citations83
US5561240AOct 1, 1996
Leak detecting apparatus using compound turbo-molecular pump
ULVAC CORP46 citations83
US5734163AMar 31, 1998
Zero method of controlling quadrupole mass spectrometer and control circuit arrangement to carry out this method
ULVAC CORP17 citations82
US4581245AApr 8, 1986
Method of manufacturing of abrasion resisting magnetic recording product
ULVAC CORP24 citations82
US4237183ADec 2, 1980
Process for the surface treatment of a synthetic resin lens and the product thereof
ULVAC CORP22 citations82
US6413392B1Jul 2, 2002
Sputtering device
ULVAC CORP19 citations80
US4832715AMay 23, 1989
Fine particle collector arrangement for vacuum pumps
ULVAC CORP20 citations78
US6469448B2Oct 22, 2002
Inductively coupled RF plasma source
ULVAC CORP17 citations76
US5147734ASep 15, 1992
Magnetic recording media manufactured by a process in which a negative bias voltage is applied to the substrate during sputtering
ULVAC CORP8 citations74
US5116479AMay 26, 1992
Process for producing transparent conductive film comprising indium oxide
ULVAC CORP16 citations74
US4587179AMay 6, 1986
Magnetic recording medium and manufacturing process thereof
ULVAC CORP7 citations74
US5024854AJun 18, 1991
Method of manufacturing perpendicular type magnetic recording member
ULVAC CORP8 citations73
US6507698B2Jan 14, 2003
Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic film
ULVAC CORP10 citations72
US5762750AJun 9, 1998
Magnetic neutral line discharged plasma type surface cleaning apparatus
ULVAC CORP12 citations72
Showing the top 50 of 66 patents by PatentIndex Score.