Assignee
ULVAC INC
JP214 patents
Top patents by PatentIndex Score
US7821767B2Oct 26, 2010
Electrostatic chuck device
ULVAC INC67 citations98
US7081214B2Jul 25, 2006
Electroconductive metal paste and method for production thereof
ULVAC INC76 citations96
US7510984B2Mar 31, 2009
Method of forming silicon nitride film and method of manufacturing semiconductor device
ULVAC INC86 citations94
US7419904B2Sep 2, 2008
Method for forming barrier film and method for forming electrode film
ULVAC INC30 citations93
US7815965B2Oct 19, 2010
Industrial microdeposition system including masking to reduce the impact of droplet alignment and droplet volume tolerances and errors
ULVAC INC27 citations92
US7611754B2Nov 3, 2009
Industrial microdeposition system including masking to reduce the impact of droplet alignment and droplet volume tolerances and errors
ULVAC INC25 citations92
US7033461B2Apr 25, 2006
Thin film forming apparatus and method
ULVAC INC24 citations92
US7927472B2Apr 19, 2011
Optical film thickness controlling method, optical film thickness controlling apparatus, dielectric multilayer film manufacturing apparatus, and dielectric multilayer film manufactured using the same controlling apparatus or manufacturing apparatus
ULVAC INC26 citations91
US7828900B2Nov 9, 2010
Vacuum film-forming apparatus
ULVAC INC17 citations91
US7763115B2Jul 27, 2010
Vacuum film-forming apparatus
ULVAC INC34 citations91
US7757632B2Jul 20, 2010
Waveform generator for microdeposition control system
ULVAC INC40 citations91
US7449070B2Nov 11, 2008
Waveform generator for microdeposition control system
ULVAC INC40 citations91
US6933010B2Aug 23, 2005
Mixer, and device and method for manufacturing thin-film
ULVAC INC16 citations91
US6280585B1Aug 28, 2001
Sputtering apparatus for filling pores of a circular substrate
ULVAC INC71 citations91
US8764902B2Jul 1, 2014
Film-forming apparatus
ULVAC INC30 citations90
US7628840B2Dec 8, 2009
Metal nano-particles and method for preparing the same, dispersion of metal nano-particles and method for preparing the same, and thin metallic wire and metal film and method for preparing these substances
ULVAC INC38 citations90
US6930316B2Aug 16, 2005
Ion implantation system and ion implantation method
ULVAC INC60 citations90
US6706155B2Mar 16, 2004
Sputtering apparatus and film manufacturing method
ULVAC INC28 citations90
US6700370B2Mar 2, 2004
Apparatus for measuring the thickness of a thin film having eddy current coil sensor
ULVAC INC34 citations90
US6451682B1Sep 17, 2002
Method of forming interconnect film
ULVAC INC26 citations89
US7901026B2Mar 8, 2011
Drop analysis system
ULVAC INC21 citations88
US7887156B2Feb 15, 2011
Integral printhead assembly
ULVAC INC26 citations87
USD625748SOct 19, 2010
Vacuum transfer robot
ULVAC INC10 citations84
US7728252B2Jun 1, 2010
Etching method and system
ULVAC INC12 citations83
US7645112B2Jan 12, 2010
Transport apparatus, control method for the same, and vacuum processing system
ULVAC INC12 citations83
US7572093B2Aug 11, 2009
Transport apparatus, control method for the same, and vacuum processing system
ULVAC INC8 citations83
US7398685B2Jul 15, 2008
Measuring method using surface acoustic wave device, and surface acoustic wave device and biosensor device
ULVAC INC12 citations83
US7111500B2Sep 26, 2006
Analysis method using piezoelectric resonator
ULVAC INC15 citations83
US6840732B2Jan 11, 2005
Transport apparatus and vacuum processing system using the same
ULVAC INC20 citations83
US8366375B2Feb 5, 2013
Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus
ULVAC INC10 citations82
US8356575B2Jan 22, 2013
Ion source and plasma processing apparatus
ULVAC INC33 citations82
US7618493B2Nov 17, 2009
Device and method for manufacturing thin films
ULVAC INC17 citations82
US7338900B2Mar 4, 2008
Method for forming tungsten nitride film
ULVAC INC20 citations82
US11320200B1May 3, 2022
Freeze-drying device and freeze-drying method
ULVAC INC6 citations81
US8367542B2Feb 5, 2013
Semiconductor device manufacturing method and semiconductor device manufacturing apparatus
ULVAC INC6 citations81
USD557156SDec 11, 2007
Mass spectrometer
ULVAC INC33 citations81
US7955043B2Jun 7, 2011
Substrate transfer apparatus
ULVAC INC12 citations80
US8028972B2Oct 4, 2011
Gate valve for vacuum apparatus
ULVAC INC14 citations78
US7347919B2Mar 25, 2008
Sputter source, sputtering device, and sputtering method
ULVAC INC10 citations77
US6885154B2Apr 26, 2005
Discharge plasma processing system
ULVAC INC15 citations75
US7247341B2Jul 24, 2007
Method for forming electrodes of flat panel display
ULVAC INC7 citations74
US11319627B2May 3, 2022
Vacuum processing apparatus
ULVAC INC3 citations73
US11239063B2Feb 1, 2022
Vacuum processing apparatus
ULVAC INC3 citations73
US9960018B2May 1, 2018
RF sputtering apparatus and sputtering method
ULVAC INC3 citations73
US6919106B2Jul 19, 2005
Method for preparing porous SOG film
ULVAC INC9 citations73
US9903012B2Feb 27, 2018
Film formation method and film formation apparatus
ULVAC INC3 citations72
US7247345B2Jul 24, 2007
Optical film thickness controlling method and apparatus, dielectric multilayer film and manufacturing apparatus thereof
ULVAC INC9 citations72
US7201041B2Apr 10, 2007
Analysis method using piezoelectric resonator
ULVAC INC8 citations72
US11384423B2Jul 12, 2022
Sputtering apparatus and sputtering method
ULVAC INC2 citations71
US8377207B2Feb 19, 2013
Purge gas assembly
ULVAC INC5 citations71
Showing the top 50 of 214 patents by PatentIndex Score.