Assignee
UMMETHALA UPENDRA
US·2 granted patents·1 pending application·3 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0170US9298106B1Wafer stage with reciprocating wafer stage actuation controlUMMETHALA UPENDRA·Filed 2012·Granted Mar 29, 2016·3 cites·26 claims
- 0250US2011172952A1Apparatus and Method for Measuring Position and/or Motion Using Surface Micro-StructureUMMETHALA UPENDRA·Filed 2009·Application pending·0 cites
- 0340US9690213B2Linear Stage for reflective electron beam lithographyUMMETHALA UPENDRA·Filed 2012·Granted Jun 27, 2017·0 cites·63 claims
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