Assignee
VAN BOXTEL FRANK JOHANNES JACOBUS
NL·4 granted patents·1 pending application·6 citations·filing 2011–2012
Top patents by PatentIndex Score
5 records- 0180US8675169B2Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2011·Granted Mar 18, 2014·4 cites·20 claims
- 0270US9811007B2Lithographic apparatus and method of cooling a component in a lithographic apparatusVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2012·Granted Nov 7, 2017·2 cites·16 claims
- 0340US8675170B2Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2012·Granted Mar 18, 2014·0 cites·20 claims
- 0438US8988657B2Lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2012·Granted Mar 24, 2015·0 cites·19 claims
- 0532US2012236275A1Projection system, lithographic apparatus and device manufacturing methodVAN BOXTEL FRANK JOHANNES JACOBUS·Filed 2012·Application pending·0 cites
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