Assignee
VAN DER WIJST MARC WILHELMUS MARIA
NL·3 granted patents·1 pending application·6 citations·filing 2008–2011
Top patents by PatentIndex Score
4 records- 0178US9134632B2Lithographic apparatus and device manufacturing methodVAN DER WIJST MARC WILHELMUS MARIA·Filed 2011·Granted Sep 15, 2015·3 cites·19 claims
- 0271US8203694B2Lithographic apparatus, projection assembly and active dampingVAN DER WIJST MARC WILHELMUS MARIA·Filed 2008·Granted Jun 19, 2012·3 cites·24 claims
- 0352US8457385B2Measurement system and lithographic apparatus for measuring a position dependent signal of a movable objectVAN DER WIJST MARC WILHELMUS MARIA·Filed 2011·Granted Jun 4, 2013·0 cites·13 claims
- 0450US2012013883A1Method of Reducing Noise in an Original Signal, and Signal Processing Device ThereforVAN DER WIJST MARC WILHELMUS MARIA·Filed 2011·Application pending·0 cites
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