Assignee
VAN HAREN RICHARD JOHANNES FRANCISCUS
NL·5 granted patents·1 pending application·24 citations·filing 2006–2012
Top patents by PatentIndex Score
6 records- 0192US8115938B2Method of providing alignment marks, device manufacturing method and lithographic apparatusVAN HAREN RICHARD JOHANNES FRANCISCUS·Filed 2009·Granted Feb 14, 2012·16 cites·23 claims
- 0270US8252491B2Method of forming a marker, substrate having a marker and device manufacturing methodVAN HAREN RICHARD JOHANNES FRANCISCUS·Filed 2009·Granted Aug 28, 2012·4 cites·14 claims
- 0362US8609441B2Substrate comprising a markVAN HAREN RICHARD JOHANNES FRANCISCUS·Filed 2007·Granted Dec 17, 2013·2 cites·13 claims
- 0455US8319967B2Marker structure and method of forming the sameVAN HAREN RICHARD JOHANNES FRANCISCUS·Filed 2008·Granted Nov 27, 2012·0 cites·12 claims
- 0553US8722179B2Substrate comprising a markVAN HAREN RICHARD JOHANNES FRANCISCUS·Filed 2006·Granted May 13, 2014·2 cites·18 claims
- 0651US2013070226A1Marker structure and method of forming the sameVAN HAREN RICHARD JOHANNES FRANCISCUS·Filed 2012·Application pending·0 cites
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