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VARIAN SPA
IT22 patents
Top patents by PatentIndex Score
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Annular support for rolling bearings
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Ionization vacuum gauge
VARIAN SPA19 citations91
US5325708AJul 5, 1994
Detector for helium leaks
VARIAN SPA25 citations88
US4631002ADec 23, 1986
Ion pump
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Ionization vacuum gauge
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US7141096B2Nov 28, 2006
Gas-selective permeable membrane and method of manufacturing thereof
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US6877949B2Apr 12, 2005
Pumping stage for a vacuum pump
VARIAN SPA9 citations71
US4713619ADec 15, 1987
Electronic device for feeding ion pump
VARIAN SPA11 citations69
US7334481B2Feb 26, 2008
Pressure sensor with improved vibrating microassembly and optical detection system
VARIAN SPA4 citations61
US7083398B2Aug 1, 2006
Vibrating pumping stage for molecular vacuum pumps, and molecular vacuum pump with vibrating pumping stages
VARIAN SPA2 citations61
US6676368B2Jan 13, 2004
Turbine pump with a stator stage integrated with a spacer ring
VARIAN SPA6 citations60
US6627837B1Sep 30, 2003
Method of manufacturing a stator stage for a turbine pump
VARIAN SPA5 citations60
US7621721B2Nov 24, 2009
Vacuum pumping device with electronic control of the motor
VARIAN SPA2 citations59
US7588426B2Sep 15, 2009
Oil rotary vacuum pump and manufacturing method thereof
VARIAN SPA5 citations58
US7062954B2Jun 20, 2006
Leak detector
VARIAN SPA6 citations58
US7059192B2Jun 13, 2006
Pressure sensor
VARIAN SPA6 citations58
US7354254B2Apr 8, 2008
Compact vacuum pump
VARIAN SPA5 citations56
US7134835B2Nov 14, 2006
Process for manufacturing a stator for vacuum pump and stator obtained thereby
VARIAN SPA3 citations56
US7628577B2Dec 8, 2009
Vacuum pumps with improved pumping channel configurations
VARIAN SPA1 citations52
US5017836AMay 21, 1991
Electronic feeder for an ion pump
VARIAN SPA2 citations51
US7597013B2Oct 6, 2009
Device and method for detecting the presence of test gas
VARIAN SPA1 citations48
US6672828B2Jan 6, 2004
Vacuum pump
VARIAN SPA1 citations48