Individual holder
VASCHENKO GEORGIY O
US·5 granted patents·61 citations·filing 2009–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
5 records- 0197US8158960B2Laser produced plasma EUV light sourceVASCHENKO GEORGIY O·Filed 2010·Granted Apr 17, 2012·35 cites·20 claims
- 0292US8138487B2System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamberVASCHENKO GEORGIY O·Filed 2010·Granted Mar 20, 2012·16 cites·22 claims
- 0381US8530871B2Laser produced plasma EUV light sourceVASCHENKO GEORGIY O·Filed 2012·Granted Sep 10, 2013·4 cites·10 claims
- 0466US8319201B2Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance waveVASCHENKO GEORGIY O·Filed 2011·Granted Nov 27, 2012·2 cites·26 claims
- 0550US8969838B2Systems and methods for protecting an EUV light source chamber from high pressure source material leaksVASCHENKO GEORGIY O·Filed 2009·Granted Mar 3, 2015·4 cites·20 claims
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