Assignee
VENKATARAMAN SHYAM SUNDAR
TW·2 granted patents·6 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0176US9524874B2Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon filmsVENKATARAMAN SHYAM SUNDAR·Filed 2011·Granted Dec 20, 2016·6 cites·17 claims
- 0236US9157012B2Process for the manufacture of semiconductor devices comprising the chemical mechanical polishing of borophosphosilicate glass (BPSG) material in the presence of a CMP composition comprising anionic phosphate or phosphonateVENKATARAMAN SHYAM SUNDAR·Filed 2011·Granted Oct 13, 2015·0 cites·17 claims
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