Assignee
VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS
NL·4 granted patents·3 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0170US9141004B2Lithographic apparatus and methodVERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS·Filed 2012·Granted Sep 22, 2015·2 cites·20 claims
- 0264US8932042B2Lithographic apparatus and device manufacturing methodVERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS·Filed 2011·Granted Jan 13, 2015·1 cites·21 claims
- 0353US9041913B2Lithographic apparatus and device manufacturing method with bearing to allow substrate holder to float with respect to substrate tableVERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS·Filed 2009·Granted May 26, 2015·0 cites·21 claims
- 0440US8685295B2Imprint lithography apparatusVERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS·Filed 2010·Granted Apr 1, 2014·0 cites·20 claims
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