Assignee
VIATRON TECHNOLOGIES INC
KR·3 granted patents·498 citations·filing 2002–2008
Top patents by PatentIndex Score
3 records- 0194US7989736B2System for heat treatment of semiconductor deviceVIATRON TECHNOLOGIES INC·Filed 2006·Granted Aug 2, 2011·475 cites·51 claims
- 0275US6747254B2Apparatuses for heat-treatment of semiconductor films under low temperatureVIATRON TECHNOLOGIES INC·Filed 2002·Granted Jun 8, 2004·20 cites·11 claims
- 0361US7932138B2Method for manufacturing thin film transistorVIATRON TECHNOLOGIES INC·Filed 2008·Granted Apr 26, 2011·3 cites·12 claims
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