Assignee

VISHAL VAIBHAW

US2 patents

Top patents by PatentIndex Score

US8681493B2Mar 25, 2014

Heat shield module for substrate-like metrology device

VISHAL VAIBHAW2 citations56

US9514970B2Dec 6, 2016

Methods of attaching a module on wafer substrate

VISHAL VAIBHAW1 citations42