Assignee
VISTEC ELECTRON BEAM GMBH
DE·5 granted patents·151 citations·filing 2005–2016
Top patents by PatentIndex Score
5 records- 0192US7741620B2Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrateVISTEC ELECTRON BEAM GMBH·Filed 2005·Granted Jun 22, 2010·135 cites·22 claims
- 0278US7435517B2Method for reducing the fogging effectVISTEC ELECTRON BEAM GMBH·Filed 2005·Granted Oct 14, 2008·8 cites·8 claims
- 0375US7560713B2Correction lens system for a particle beam projection deviceVISTEC ELECTRON BEAM GMBH·Filed 2005·Granted Jul 14, 2009·5 cites·7 claims
- 0466US7601969B2Illumination condenser for a particle optical projection systemVISTEC ELECTRON BEAM GMBH·Filed 2005·Granted Oct 13, 2009·2 cites·12 claims
- 0550US10814361B2Particle beam apparatus and method for operating a particle beam apparatusVISTEC ELECTRON BEAM GMBH·Filed 2016·Granted Oct 27, 2020·1 cites·19 claims
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