Assignee
VLADIMIRSKY YULI
US·4 granted patents·1 pending application·14 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0183US8634054B2Particle detection on an object surfaceVLADIMIRSKY YULI·Filed 2009·Granted Jan 21, 2014·9 cites·20 claims
- 0271US9594030B2Lithographic apparatus and device manufacturing methodVLADIMIRSKY YULI·Filed 2012·Granted Mar 14, 2017·2 cites·27 claims
- 0365US8558988B2Thin film continuous spatially modulated grey attenuators and filtersVLADIMIRSKY YULI·Filed 2008·Granted Oct 15, 2013·2 cites·19 claims
- 0459US8681313B2Diffraction elements for alignment targetsVLADIMIRSKY YULI·Filed 2009·Granted Mar 25, 2014·1 cites·13 claims
- 0537US2012086800A1Surface Inspection System with Advanced IlluminationVLADIMIRSKY YULI·Filed 2010·Application pending·0 cites
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