Assignee
VLSI TECHNOLOGY RES ASS
50 granted patents·1,443 citations·filing 1977–1984
Top patents by PatentIndex Score
50 records- 0194US4314595AMethod of forming nondefective zone in silicon single crystal wafer by two stage-heat treatmentVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Feb 9, 1982·179 cites·13 claims
- 0292US4232439AMasking technique usable in manufacturing semiconductor devicesVLSI TECHNOLOGY RES ASS·Filed 1977·Granted Nov 11, 1980·67 cites·4 claims
- 0391US4523213AMOS Semiconductor device and method of manufacturing the sameVLSI TECHNOLOGY RES ASS·Filed 1982·Granted Jun 11, 1985·88 cites·8 claims
- 0491US4376657AMethod of making fault-free surface zone in semiconductor devices by step-wise heat treatingVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Mar 15, 1983·107 cites·9 claims
- 0588US4630095APackaged semiconductor device structure including getter material for decreasing gas from a protective organic coveringVLSI TECHNOLOGY RES ASS·Filed 1984·Granted Dec 16, 1986·78 cites·11 claims
- 0683US4314269ASemiconductor resistor comprising a resistor layer along a side surfaceVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Feb 2, 1982·58 cites·10 claims
- 0783US4259407ARadiation-sensitive positive resistVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Mar 31, 1981·35 cites·5 claims
- 0881US4218291AProcess for forming metal and metal silicide filmsVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Aug 19, 1980·31 cites·19 claims
- 0979US4317200AMethod and device for testing a sequential circuit divided into a plurality of partitionsVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Feb 23, 1982·35 cites·4 claims
- 1078US4799009ASemiconductor testing deviceVLSI TECHNOLOGY RES ASS·Filed 1983·Granted Jan 17, 1989·44 cites·2 claims
- 1177US4291990AApparatus for measuring the distribution of irregularities on a mirror surfaceVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Sep 29, 1981·29 cites·14 claims
- 1277US4151421AMethod for compressing pattern data and data compression processing circuit for radiant beam exposure apparatusesVLSI TECHNOLOGY RES ASS·Filed 1978·Granted Apr 24, 1979·20 cites·9 claims
- 1376US4504332AMethod of making a bipolar transistorVLSI TECHNOLOGY RES ASS·Filed 1982·Granted Mar 12, 1985·43 cites·5 claims
- 1475US4292091AMethod of producing semiconductor devices by selective laser irradiation and oxidationVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Sep 29, 1981·41 cites·22 claims
- 1575US4280854AMethod of manufacturing a semiconductor device having conductive and insulating portions formed of a common material utilizing selective oxidation and angled ion-implantationVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Jul 28, 1981·30 cites·2 claims
- 1674US4378269AMethod of manufacturing a single crystal silicon rodVLSI TECHNOLOGY RES ASS·Filed 1981·Granted Mar 29, 1983·18 cites·2 claims
- 1774US4375999AMethod of manufacturing a semiconductor deviceVLSI TECHNOLOGY RES ASS·Filed 1981·Granted Mar 8, 1983·39 cites·9 claims
- 1874US4259724ADevice comprising a circuit for making a beam exposure system effectively draw a repetitive patternVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Mar 31, 1981·21 cites·1 claims
- 1974US4219731AMethod for detecting object picture by electron beamVLSI TECHNOLOGY RES ASS·Filed 1978·Granted Aug 26, 1980·16 cites·3 claims
- 2071US4218621AElectron beam exposure apparatusVLSI TECHNOLOGY RES ASS·Filed 1978·Granted Aug 19, 1980·12 cites·13 claims
- 2170US4410951APositioning apparatusVLSI TECHNOLOGY RES ASS·Filed 1982·Granted Oct 18, 1983·30 cites·4 claims
- 2270US4193783AMethod of treating a silicon single crystal ingotVLSI TECHNOLOGY RES ASS·Filed 1978·Granted Mar 18, 1980·21 cites·35 claims
- 2369US4576678APattern forming methodVLSI TECHNOLOGY RES ASS·Filed 1984·Granted Mar 18, 1986·24 cites·17 claims
- 2468US4487161ASemiconductor device manufacturing unitVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Dec 11, 1984·21 cites·5 claims
- 2568US4335505AMethod of manufacturing semiconductor memory device having memory cell elements composed of a transistor and a capacitorVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Jun 22, 1982·17 cites·7 claims
- 2668US4231657ALight-reflection type pattern forming systemVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Nov 4, 1980·17 cites·15 claims
- 2767US4322881AMethod for manufacturing semiconductor memory devicesVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Apr 6, 1982·24 cites·8 claims
- 2864US4151417AElectron beam exposure apparatusVLSI TECHNOLOGY RES ASS·Filed 1978·Granted Apr 24, 1979·9 cites·7 claims
- 2962US4348577AHigh selectivity plasma etching methodVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Sep 7, 1982·23 cites·3 claims
- 3062US4283439AMethod of manufacturing a semiconductor device by forming a tungsten silicide or molybdenum silicide electrodeVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Aug 11, 1981·23 cites·6 claims
- 3162US4281399ASemiconductor memory deviceVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Jul 28, 1981·11 cites·12 claims
- 3262US4256778AMethod of inspecting and retouching a photo maskVLSI TECHNOLOGY RES ASS·Filed 1978·Granted Mar 17, 1981·15 cites·10 claims
- 3361US4346325AElectron gunVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Aug 24, 1982·9 cites·3 claims
- 3461US4292156AMethod of manufacturing semiconductor devicesVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Sep 29, 1981·22 cites·8 claims
- 3561US4181860ARadiant beam exposure methodVLSI TECHNOLOGY RES ASS·Filed 1978·Granted Jan 1, 1980·9 cites·7 claims
- 3659US4377902AMethod of manufacturing semiconductor device using laser beam crystallized poly/amorphous layerVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Mar 29, 1983·22 cites·11 claims
- 3759US4371423AMethod of manufacturing semiconductor device utilizing a lift-off techniqueVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Feb 1, 1983·27 cites·16 claims
- 3857US4225958ADevice comprising circuits for holding, in particular, a test data signalVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Sep 30, 1980·15 cites·6 claims
- 3950US4313255AMethod for manufacturing integrated circuit deviceVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Feb 2, 1982·15 cites·7 claims
- 4049US4321284AManufacturing method for semiconductor deviceVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Mar 23, 1982·17 cites·6 claims
- 4148US4438315AHigh selectivity plasma etching apparatusVLSI TECHNOLOGY RES ASS·Filed 1981·Granted Mar 20, 1984·14 cites·4 claims
- 4247US4348804AMethod of fabricating an integrated circuit device utilizing electron beam irradiation and selective oxidationVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Sep 14, 1982·11 cites·6 claims
- 4347US4338139AMethod of forming Schottky-I2 L devices by implantation and laser bombardmentVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Jul 6, 1982·14 cites·11 claims
- 4446US4269653AAperture stopVLSI TECHNOLOGY RES ASS·Filed 1979·Granted May 26, 1981·6 cites·4 claims
- 4542US4268607AMethod of patterning a resist layer for manufacture of a semiconductor elementVLSI TECHNOLOGY RES ASS·Filed 1978·Granted May 19, 1981·6 cites·5 claims
- 4641US4264715AMethod of preparing resist patternVLSI TECHNOLOGY RES ASS·Filed 1979·Granted Apr 28, 1981·6 cites·7 claims
- 4740US4368230APhotomaskVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Jan 11, 1983·7 cites·13 claims
- 4839US4372030AMethod for producing a semiconductor deviceVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Feb 8, 1983·8 cites·8 claims
- 4937US4366383AElectron beam type pattern transfer apparatusVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Dec 28, 1982·8 cites·2 claims
- 5018US4389125AMethod for measuring surface temperature distribution and systemVLSI TECHNOLOGY RES ASS·Filed 1980·Granted Jun 21, 1983·1 cites·20 claims
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