Assignee
VM INC
KR·1 granted patent·14 pending applications·0 citations·filing 2023–2025
Top patents by PatentIndex Score
15 records- 0169US12570485B2Substrate transfer apparatus using upper and lower magnetic levitation railsVM INC·Filed 2023·Granted Mar 10, 2026·0 cites·12 claims
- 0260US2025197140A1Substrate transfer apparatus using upper and lower magnetic levitation railsVM INC·Filed 2025·Application pending·0 cites
- 0355US2026100335A1Plasma processing device including baffle for plasma confiningVM INC·Filed 2024·Application pending·0 cites
- 0454US2025149304A1System for controlling a slope and location of an upper electrodeVM INC·Filed 2024·Application pending·0 cites
- 0553US2025385114A1Substrate transfer apparatusVM INC·Filed 2024·Application pending·0 cites
- 0652US2025087511A1Method for determining a center position of a transferred semiconductor part and a system for determining the sameVM INC·Filed 2024·Application pending·0 cites
- 0752US2025087467A1Shallow etching process chamberVM INC·Filed 2024·Application pending·0 cites
- 0851US2025001583A1Substrate transfer apparatusVM INC·Filed 2024·Application pending·0 cites
- 0951US2024379397A1Substrate transfer apparatusVM INC·Filed 2024·Application pending·0 cites
- 1050US2025054792A1Substrate transfer apparatus including multilayer efemVM INC·Filed 2023·Application pending·0 cites
- 1150US2025029859A1Substrate transfer apparatus allowing movement between layersVM INC·Filed 2023·Application pending·0 cites
- 1246US2025299932A1Vertical fastener assembly for coupling an upper electrode of a plasma chamberVM INC·Filed 2025·Application pending·0 cites
- 1342US2025105031A1Spraying nozzle type of an apparatus for removing a residual gas on a waferVM INC·Filed 2024·Application pending·0 cites
- 1442US2025299925A1Substrate damage reducing type of an apparatus for etching an atomic layerVM INC·Filed 2025·Application pending·0 cites
- 1542US2025273518A1Method for producing a module by adhering parts made of different kinds of materials for a semiconductor etching processVM INC·Filed 2025·Application pending·0 cites
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