Assignee
VOGEL HERMAN
US·5 granted patents·13 citations·filing 2007–2012
Top patents by PatentIndex Score
5 records- 0191US8730450B2Immersion photolithography system and method using microchannel nozzlesVOGEL HERMAN·Filed 2011·Granted May 20, 2014·4 cites·20 claims
- 0288US8670105B2Immersion photolithography system and method using microchannel nozzlesVOGEL HERMAN·Filed 2011·Granted Mar 11, 2014·3 cites·20 claims
- 0383US9081311B2Lithographic apparatus and device manufacturing methodVOGEL HERMAN·Filed 2012·Granted Jul 14, 2015·5 cites·20 claims
- 0468US8210248B2Method and systems for compact, micro-channel, laminar heat exchangingVOGEL HERMAN·Filed 2007·Granted Jul 3, 2012·1 cites·30 claims
- 0563US8817230B2Immersion photolithography system and method using microchannel nozzlesVOGEL HERMAN·Filed 2012·Granted Aug 26, 2014·0 cites·20 claims
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