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WADA KENJI
JP7 patents
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Composition for optical materials
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Photosensitive composition, and pattern-forming method and resist film using the photosensitive composition
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US9051403B2Jun 9, 2015
Photosensitive composition, pattern forming method using the photosensitive composition and compound for use in the photosensitive composition
WADA KENJI1 citations51
US8877969B2Nov 4, 2014
Photosensitive composition, compound for use in the photosensitive composition and pattern forming method using the photosensitive composition
WADA KENJI0 citations51
US8530583B2Sep 10, 2013
Thermo- and/or photo-sensitive material and insulator film made thereof
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US8426101B2Apr 23, 2013
Photosensitive composition, pattern-forming method using the photosensitve composition and compound in the photosensitive composition
WADA KENJI0 citations51
US8507172B2Aug 13, 2013
Positive resist composition and pattern forming method using the positive resist composition
WADA KENJI0 citations41