Assignee
WAECHTLER THOMAS
DE2 patents
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US8507038B2Aug 13, 2013
Substrate having a coating comprising copper and method for the production thereof by means of atomic layer deposition
WAECHTLER THOMAS2 citations54
US9005705B2Apr 14, 2015
Method for the production of a substrate having a coating comprising copper, and coated substrate and device prepared by this method
WAECHTLER THOMAS0 citations31