Assignee
WAFER SOLUTIONS INC
US·3 granted patents·1 pending application·102 citations·filing 2001–2001
Top patents by PatentIndex Score
4 records- 0188US6672943B2Eccentric abrasive wheel for wafer processingWAFER SOLUTIONS INC·Filed 2001·Granted Jan 6, 2004·67 cites·19 claims
- 0274US6852012B2Cluster tool systems and methods for in fab wafer processingWAFER SOLUTIONS INC·Filed 2001·Granted Feb 8, 2005·28 cites·19 claims
- 0358US6632012B2Mixing manifold for multiple inlet chemistry fluidsWAFER SOLUTIONS INC·Filed 2001·Granted Oct 14, 2003·7 cites·17 claims
- 0428US2002086625A1Vacuum mount wafer polishing methods and apparatusWAFER SOLUTIONS INC·Filed 2001·Application pending·0 cites
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