Assignee
WAHLSTEN MIKAEL
SE·7 granted patents·1 pending application·20 citations·filing 2007–2011
Top patents by PatentIndex Score
8 records- 0190US9032342B2Method and apparatus for alignment optimization with respect to plurality of layersWAHLSTEN MIKAEL·Filed 2011·Granted May 12, 2015·7 cites·16 claims
- 0287US8594825B2Method and apparatus for alignment optimization with respect to plurality of layers for writing different layers with different machine configurationsWAHLSTEN MIKAEL·Filed 2011·Granted Nov 26, 2013·6 cites·20 claims
- 0373US9341962B2Method and apparatus for performing pattern alignment to dieWAHLSTEN MIKAEL·Filed 2011·Granted May 17, 2016·3 cites·29 claims
- 0466US8594824B2Method and apparatus for performing pattern alignment to plurality of diesWAHLSTEN MIKAEL·Filed 2011·Granted Nov 26, 2013·1 cites·53 claims
- 0566US8530120B2Method and apparatus for performing pattern reconnection after individual or multipart alignmentWAHLSTEN MIKAEL·Filed 2011·Granted Sep 10, 2013·1 cites·63 claims
- 0664US8934081B2Method and apparatus for performing alignment using reference boardWAHLSTEN MIKAEL·Filed 2011·Granted Jan 13, 2015·2 cites·29 claims
- 0746US9210814B2Apparatuses and methods for compensation of carrier distortions from measurement machinesWAHLSTEN MIKAEL·Filed 2011·Granted Dec 8, 2015·0 cites·5 claims
- 0840US2007201732A1Apparatuses, methods and computer programs for artificial resolution enhancement in optical systemsWAHLSTEN MIKAEL·Filed 2007·Application pending·0 cites
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