Assignee
WAKABAYASHI SHINJI
JP·8 granted patents·158 citations·filing 2007–2012
Top patents by PatentIndex Score
8 records- 0196US9443749B2Vacuum processing apparatusWAKABAYASHI SHINJI·Filed 2012·Granted Sep 13, 2016·142 cites·17 claims
- 0286US8123456B2Container changing system and container changing methodWAKABAYASHI SHINJI·Filed 2008·Granted Feb 28, 2012·11 cites·10 claims
- 0367US9330950B2Substrate processing apparatusWAKABAYASHI SHINJI·Filed 2010·Granted May 3, 2016·2 cites·5 claims
- 0465US8999103B2Substrate processing system, substrate processing method and storage mediumWAKABAYASHI SHINJI·Filed 2007·Granted Apr 7, 2015·2 cites·6 claims
- 0562US8230728B2Alcohol concentration sensor disposed in fuel tank of automotive vehicleWAKABAYASHI SHINJI·Filed 2008·Granted Jul 31, 2012·1 cites·23 claims
- 0650US9389607B2Method for setting substrate-treatment time, and storage mediumWAKABAYASHI SHINJI·Filed 2012·Granted Jul 12, 2016·0 cites·7 claims
- 0745US9096395B2Electric actuatorWAKABAYASHI SHINJI·Filed 2012·Granted Aug 4, 2015·0 cites·7 claims
- 0841US9269599B2Substrate relay apparatus, substrate relay method, and substrate processing apparatusWAKABAYASHI SHINJI·Filed 2012·Granted Feb 23, 2016·0 cites·9 claims
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