Assignee
WALSH PHILLIP
US3 patents
Top patents by PatentIndex Score
US8867041B2Oct 21, 2014
Optical vacuum ultra-violet wavelength nanoimprint metrology
WALSH PHILLIP3 citations59
US8773662B2Jul 8, 2014
Methods and apparatus for vacuum ultraviolet (VUV) or shorter wavelength circular dichroism spectroscopy
WALSH PHILLIP0 citations49
US8564780B2Oct 22, 2013
Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work pieces
WALSH PHILLIP0 citations48