Assignee
WANG DAIMIAN
US·2 granted patents·16 citations·filing 2012–2012
Top patents by PatentIndex Score
2 records- 0191US8916831B2EUV actinic reticle inspection system using imaging sensor with thin film spectral purity filter coatingWANG DAIMIAN·Filed 2012·Granted Dec 23, 2014·15 cites·25 claims
- 0264US9625810B2Source multiplexing illumination for mask inspectionWANG DAIMIAN·Filed 2012·Granted Apr 18, 2017·1 cites·17 claims
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