Assignee
WANGLER JOHANNES
DE·2 granted patents·1 pending application·9 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0189US8294877B2Illumination optical unit for projection lithographyWANGLER JOHANNES·Filed 2012·Granted Oct 23, 2012·7 cites·15 claims
- 0268US8395756B2Illumination system for a microlithographic projection exposure apparatusWANGLER JOHANNES·Filed 2008·Granted Mar 12, 2013·2 cites·49 claims
- 0341US2012153189A1Optical system for generating a light beam for treating a substrateWANGLER JOHANNES·Filed 2012·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →