Assignee
WATANABE TSUKASA
JP·7 granted patents·11 citations·filing 2007–2012
Top patents by PatentIndex Score
7 records- 0175US8152928B2Substrate cleaning method, substrate cleaning system and program storage mediumWATANABE TSUKASA·Filed 2007·Granted Apr 10, 2012·5 cites·8 claims
- 0269US8197606B2Substrate cleaning method, substrate cleaning apparatus, control program, and computer-readable storage mediumWATANABE TSUKASA·Filed 2010·Granted Jun 12, 2012·2 cites·14 claims
- 0366US8083857B2Substrate cleaning method and substrate cleaning apparatusWATANABE TSUKASA·Filed 2008·Granted Dec 27, 2011·2 cites·12 claims
- 0462US9146136B2Axis run-out measuring method and angle detecting device with self-calibration function having axis run-out measuring functionWATANABE TSUKASA·Filed 2010·Granted Sep 29, 2015·1 cites·2 claims
- 0561US8449684B2Substrate cleaning method, substrate cleaning system and program storage mediumWATANABE TSUKASA·Filed 2007·Granted May 28, 2013·1 cites·6 claims
- 0641US9354085B2Angle detecting device with complex self-calibration functionWATANABE TSUKASA·Filed 2010·Granted May 31, 2016·0 cites·2 claims
- 0740US8969218B2Etching method, etching apparatus and storage mediumWATANABE TSUKASA·Filed 2012·Granted Mar 3, 2015·0 cites·12 claims
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