Assignee
WEICHART JUERGEN
LI·6 granted patents·8 citations·filing 2008–2011
Top patents by PatentIndex Score
6 records- 0171US8268142B2RF sputtering arrangementWEICHART JUERGEN·Filed 2009·Granted Sep 18, 2012·3 cites·19 claims
- 0270US10784092B2Reactive sputtering with HIPIMsWEICHART JUERGEN·Filed 2008·Granted Sep 22, 2020·2 cites·18 claims
- 0362US9719177B2In-situ conditioning for vacuum processing of polymer substratesWEICHART JUERGEN·Filed 2011·Granted Aug 1, 2017·1 cites·14 claims
- 0461US8613828B2Procedure and device for the production of a plasmaWEICHART JUERGEN·Filed 2008·Granted Dec 24, 2013·2 cites·8 claims
- 0550US8691058B2Apparatus for sputtering and a method of fabricating a metallization structureWEICHART JUERGEN·Filed 2009·Granted Apr 8, 2014·0 cites·25 claims
- 0638US8852412B2Magnetron source and method of manufacturingWEICHART JUERGEN·Filed 2011·Granted Oct 7, 2014·0 cites·18 claims
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