Assignee
WEICHART JURGEN
LI·2 granted patents·2 citations·filing 2004–2008
Top patents by PatentIndex Score
2 records- 0162US8475634B2Application of HIPIMS to through silicon via metallization in three-dimensional wafer packagingWEICHART JURGEN·Filed 2008·Granted Jul 2, 2013·2 cites·20 claims
- 0236US8778144B2Method for manufacturing magnetron coated substrates and magnetron sputter sourceWEICHART JURGEN·Filed 2004·Granted Jul 15, 2014·0 cites·10 claims
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