Assignee
WESTERLAKEN JAN STEVEN CHRISTIAAN
NL·2 granted patents·16 citations·filing 2011–2012
Top patents by PatentIndex Score
2 records- 0193US8988650B2Lithographic apparatus and device manufacturing methodWESTERLAKEN JAN STEVEN CHRISTIAAN·Filed 2011·Granted Mar 24, 2015·13 cites·20 claims
- 0272US9885964B2Lithographic apparatus and device manufacturing methodWESTERLAKEN JAN STEVEN CHRISTIAAN·Filed 2012·Granted Feb 6, 2018·3 cites·16 claims
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