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WI SOON-IM

KR2 patents

Top patents by PatentIndex Score

US9054146B2Jun 9, 2015

Substrate transfer equipment and high speed substrate processing system using the same

WI SOON-IM11 citations80

US8409400B2Apr 2, 2013

Inductive plasma chamber having multi discharge tube bridge

WI SOON-IM10 citations80