Assignee
WOLTERS PETER WERKZEUGMASCH
DE·5 granted patents·57 citations·filing 1996–2003
Top patents by PatentIndex Score
5 records- 0159US6093091AHolder for flat subjects in particular semiconductor wafersWOLTERS PETER WERKZEUGMASCH·Filed 1998·Granted Jul 25, 2000·23 cites·13 claims
- 0251US6050885ADevice for the chemical-mechanical polishing of an object, in particular a semiconductor waferWOLTERS PETER WERKZEUGMASCH·Filed 1998·Granted Apr 18, 2000·19 cites·9 claims
- 0344US6843704B2Method and apparatus for automatically loading a double-sided polishing machine with wafer crystalsWOLTERS PETER WERKZEUGMASCH·Filed 2002·Granted Jan 18, 2005·3 cites·29 claims
- 0438US5779525APolishing machineWOLTERS PETER WERKZEUGMASCH·Filed 1996·Granted Jul 14, 1998·9 cites·9 claims
- 0531US6840847B2Device for polishing digital storage discsWOLTERS PETER WERKZEUGMASCH·Filed 2003·Granted Jan 11, 2005·3 cites·18 claims
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