Assignee
WU DIEN-YEH
US·1 granted patent·2 pending applications·5 citations·filing 2007–2014
Top patents by PatentIndex Score
3 records- 0172US9447497B2Processing chamber gas delivery system with hot-swappable ampouleWU DIEN-YEH·Filed 2014·Granted Sep 20, 2016·5 cites·11 claims
- 0249US2008102208A1Vortex chamber lids for atomic layer depositionWU DIEN-YEH·Filed 2007·Application pending·0 cites
- 0340US2008102203A1Vortex chamber lids for atomic layer depositionWU DIEN-YEH·Filed 2007·Application pending·0 cites
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