Assignee

WU TSAI-WEI

1 granted patent·2 citations·filing 2006–2006

Technology mixB82Y1 G03F1 G11B1 Y10S1

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0163US7500431B2System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressureWU TSAI-WEI·Filed 2006·Granted Mar 10, 2009·2 cites·14 claims

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