Assignee
WUXI XIVI SCIENCE AND TECH CO LTD
CN·6 granted patents·3 citations·filing 2024–2024
Top patents by PatentIndex Score
6 records- 0188US12090590B1Six-degree-of-freedom air-floating moving apparatusWUXI XIVI SCIENCE AND TECH CO LTD·Filed 2024·Granted Sep 17, 2024·3 cites·4 claims
- 0265US12123699B1System and method for detecting thickness and bow of large-sized wafersWUXI XIVI SCIENCE AND TECH CO LTD·Filed 2024·Granted Oct 22, 2024·0 cites·20 claims
- 0352US12092157B1Magnetic preloading air bearing and linear platform having sameWUXI XIVI SCIENCE AND TECH CO LTD·Filed 2024·Granted Sep 17, 2024·0 cites·8 claims
- 0449US12098749B1Large-stroke air flotation type nano-positioning platformWUXI XIVI SCIENCE AND TECH CO LTD·Filed 2024·Granted Sep 24, 2024·0 cites·3 claims
- 0548US12123459B1Combinable multi-axis structure and linear motion platform having the structureWUXI XIVI SCIENCE AND TECH CO LTD·Filed 2024·Granted Oct 22, 2024·0 cites·6 claims
- 0647US12205325B2Vision-based wafer pre-alignment platform and alignment methodWUXI XIVI SCIENCE AND TECH CO LTD·Filed 2024·Granted Jan 21, 2025·0 cites·9 claims
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