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XACTIX INC
US5 patents
Top patents by PatentIndex Score
US6887337B2May 3, 2005
Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto
XACTIX INC49 citations91
US7638435B2Dec 29, 2009
Pulsed etching cooling
XACTIX INC6 citations69
US6566725B1May 20, 2003
Thermal isolation using vertical structures
XACTIX INC5 citations64
US8377253B2Feb 19, 2013
Pulsed etching cooling
XACTIX INC2 citations58
US6653239B2Nov 25, 2003
Thermal isolation using vertical structures
XACTIX INC3 citations53