Assignee
XIA YAOMIN
US·1 granted patent·1 pending application·67 citations·filing 2011–2012
Top patents by PatentIndex Score
2 records- 0192US8334657B2RF matching network of a vacuum processing chamber and corresponding configuration methodsXIA YAOMIN·Filed 2011·Granted Dec 18, 2012·67 cites·23 claims
- 0230US2012298302A1Vacuum plasma pprocessing chamber with a wafer chuck facing downward above the plasmaXIA YAOMIN·Filed 2012·Application pending·0 cites
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