Assignee
XINIX INC
US8 patents
Top patents by PatentIndex Score
US5292605AMar 8, 1994
Method for control of photoresist develop processes
XINIX INC84 citations92
US5196285AMar 23, 1993
Method for control of photoresist develop processes
XINIX INC62 citations92
US5138149AAug 11, 1992
Apparatus and method for monitoring radiant energy signals with variable signal gain and resolution enhancement
XINIX INC33 citations84
US5414504AMay 9, 1995
Interference removal
XINIX INC12 citations80
US5012119AApr 30, 1991
Method and apparatus for monitoring particles using back-scattered light without interference by bubbles
XINIX INC34 citations80
US5208644AMay 4, 1993
Interference removal
XINIX INC12 citations78
US5166525ANov 24, 1992
Through the wafer optical transmission sensor
XINIX INC10 citations68
US5064269ANov 12, 1991
Light collection method and apparatus
XINIX INC5 citations58