Assignee
XMR INC
US4 patents
Top patents by PatentIndex Score
US4733944AMar 29, 1988
Optical beam integration system
XMR INC196 citations92
US4758533AJul 19, 1988
Laser planarization of nonrefractory metal during integrated circuit fabrication
XMR INC149 citations90
US6069909AMay 30, 2000
Excimer laser with improved window mount
XMR INC14 citations73
US6103539AAug 15, 2000
Method and system for nondestructive layer defect detection
XMR INC9 citations63