Assignee
YAMADA TAKAKAZU
JP·4 granted patents·15 citations·filing 2004–2007
Top patents by PatentIndex Score
4 records- 0181US8197599B2Gas head and thin-film manufacturing apparatusYAMADA TAKAKAZU·Filed 2006·Granted Jun 12, 2012·5 cites·10 claims
- 0271US8747555B2Thin film production apparatus and inner block for thin film production apparatusYAMADA TAKAKAZU·Filed 2007·Granted Jun 10, 2014·2 cites·16 claims
- 0365US8118935B2Mixing box, and apparatus and method for producing filmsYAMADA TAKAKAZU·Filed 2005·Granted Feb 21, 2012·2 cites·7 claims
- 0455US8262798B2Shower head, device and method for manufacturing thin filmsYAMADA TAKAKAZU·Filed 2004·Granted Sep 11, 2012·6 cites·14 claims
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