Assignee
YAMADA TAKEYUKI
JP·3 granted patents·8 citations·filing 2006–2012
Top patents by PatentIndex Score
3 records- 0187US8802334B2Surface treatment method for a mask blank, method of manufacturing a mask blank, and method of manufacturing a maskYAMADA TAKEYUKI·Filed 2012·Granted Aug 12, 2014·7 cites·18 claims
- 0262US8114556B2Photomask blank and production method thereof, and photomask production method, and semiconductor device production methodYAMADA TAKEYUKI·Filed 2006·Granted Feb 14, 2012·1 cites·32 claims
- 0353US8697315B2Photomask blank and production method thereof, and photomask production method, and semiconductor device production methodYAMADA TAKEYUKI·Filed 2012·Granted Apr 15, 2014·0 cites·20 claims
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